PROFILE:
PARC publications
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2005
Chip on glass bonding using StressedMetal™ Technology
2005 SID International Symposium Digest of Technical Papers
24 May 2005
2004
2003
12th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers '03)
10 June 2003
Intermittency study of a stressed-metal micro-spring sliding electrical contact
Electronic Components and Technology Conference
29 May 2003
2002
Bent metal beams as probes for high-topography substrates in atomic force microscopy (AFM)
Micro- and Nanoengineering Conference 2002
16 September 2002
Fabrication of highly conductive micro-springs and their use as sliding-contact interconnects
Micro- and Nanoengineering Conference 2002
16 September 2002
2000
Nano-spring arrays for high density interconnect
SPIE Micromachined Devices and Components VI
19 September 2000
