home › event - vanadium oxide thermal microprobes for nanocalorimetry


Vanadium oxide thermal microprobes for nanocalorimetry

IEEE Sensors 2010

1 November 2010 - 4 November 2010
Waikoloa, Hawaii, USA



Highly sensitive thermal microprobes are presented, consisting of curved cantilevers with vanadium oxide thermistors located at their tips. The cantilevers are realized by stress-engineered metal thin films and the thermistors consist of reactively sputter-deposited vanadium pentoxide. The thermistors are electrically contacted through the stressed metal layer, and at the same time thermally insulated from the substrate due to the relatively small thickness and large length of the cantilevers. We propose to apply these novel thermal microprobes in a nanocalorimetry system, in order to lower the cost and increase the sensitivity of the measurements.


upcoming events   view all 

The Experience When Business Meets Design
Brian Solis
27 October 2016
PARC Forum  

AI Case Studies: Pushing the Frontiers of Systems Engineering
Tolga Kurtoglu
9 November 2016 | San Francisco, CA
Conferences & Talks  

2016 AIChE Annual Meeting: Energy and Transport Processes
Corie L. Cobb
14 November 2016 - 15 November 2016 | San Francisco, CA
Conferences & Talks  

Printed Electronics USA 2016 - Visit PARC’s Booth #T20
Ross Bringans, Markus Larsson, Janos Veres
16 November 2016 - 17 November 2016 | Santa Clara, CA
Conferences & Talks