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Piezoelectric PZT Films: Novel Fabrication Approach and Applications for Energy Harvesting and Power Generation
Conferences & Talks

2013 International Symposium On Integrated Functionalities

29 July 2013
Hilton DFW Lakes Executive Conference Center, Grapevine, Texas, USA



Piezoelectric ceramic such as PZT films have the potential to be widely used in mechanical-electrical energy conversion and power generation devices due to their high piezoelectric coefficient and high electromechanical coupling factor. However, several challenges need to be overcome first in order to achieve these applications, such as fabricating high quality PZT films on various substrates, patterning thick PZT films, and batch fabrication of devices with different PZT film dimensions.

In the first part of this paper, I will present a new approach to fabricate and integrate PZT films based on the laser transfer technique. PZT films with different thick ranges, such as 1 to 10µm thick by sol-gel processing, or 10 to 100µm thick by screen printing processing, are first prepared on a sapphire substrate through high temperature sintering. Then the films will be transferred to a device substrate through laser exposure the backside of sapphire substrate, which detaches the PZT films from the sapphire substrate. This new approach makes it possible to integrate high quality PZT films on almost any kind of substrates including silicon, metal, and plastics, and paves the way to fabricate several devices for energy harvesting and power generation. The first device I will show is a broad spectrum vibrational energy harvester, which is composed of a central mass and multiple cantilever springs. The latter are fabricated by integrating PZT films with different shapes on a patterned thin stainless steel sheet, and hence different modes can be excited at different frequencies. Another device is a micro scale power generator. For this device energy from combustible fuel or compressed gas is used to create a resonant oscillation in a gas chamber, which causes PZT diaphragm transducers on the wall of the chamber to oscillate, and hence produces AC voltages.