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Progress in the preparation of aluminum nitride substrates from bulk crystals

 
 
citation

Rojo, J. C.; Schowalter, L.; Schujman, S.; Biswas, S.; Slack, G.; Morgan, K.; Barani, J.; Raghothamachar, B.; Dudley, M.; Shur, M.; Gaska, R.; Johnson, N. M. ; Kneissl, M. A. Progress in the preparation of aluminum nitride substrates from bulk crystals. Materials and Devices for Optoelectronics and Photoelectronics and Microphotonics; MRS Spring Meeting 2002 Symposium Proceedings; 2002 April; San Francisco, CA. Warrendale, PA: Materials Research Society; 2002; vol. 722; 5-13.