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Scanning probes with tall tips for high aspect ratio MEMS metrology

 
 
citation

Chow, E. M. ; Hantschel, T. ; Fork, D. K. Scanning probes with tall tips for high aspect ratio MEMS metrology. Solid State Sensor, Actuator and Microsystems Workshop; 2002 June 2-6; Hilton Head; SC; USA.