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Amorphous and heterogeneous silicon-based films 2002

 
 
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Abelson, J. R.; Boyce, J. B. ; Cohen, J. D.; Matsumura, H.; Robertson, J. Amorphous and heterogeneous silicon-based films 2002. Symposium Proceedings of the Materials Research Society Spring Meeting 2002; 2002 April 1-5; San Francisco, CA. Warrendale, PA: MRS; 2002; MRS Proceedings vol. 715.