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On-chip out-of-plane high-Q inductors

 
 
citation

Van Schuylenbergh, K. ; Chua, C. L. ; Fork, D. K. ; Lu, J. P. ; Griffiths, B. On-chip out-of-plane high-Q inductors. Proceedings of IEEE Lester Eastman Conference on High Performance Devices; 2002 August 6-8; Newark; DE; USA. Piscataway, NJ: IEEE; 2002; 364-373.