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Bent metal beams as probes for high-topography substrates in atomic force microscopy (AFM)

 
 
citation

Hantschel, T. ; Chow, E. M. ; Rudolph, D. ; Shih, C. ; Wong, L. ; Fork, D. K. Bent metal beams as probes for high-topography substrates in atomic force microscopy (AFM). Micro- and Nanoengineering Conference 2002; 2002 September 16-19; Lugano; Switzerland.