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Fabrication of highly conductive micro-springs and their use as sliding-contact interconnects

 
 
citation

Hantschel, T. ; Wong, L. ; Chua, C. L. ; Fork, D. K. Fabrication of highly conductive micro-springs and their use as sliding-contact interconnects. Micro- and Nanoengineering Conference 2002; 2002 September 16-19; Lugano; Switzerland. (to appear in special issue of Microelectronic Engineering)