Fabrication of highly conductive micro-springs and their use as sliding-contact interconnects

• Micro- and Nanoengineering Conference 2002

citation

Hantschel, T. ; Wong, L. ; Chua, C. L. ; Fork, D. K. Fabrication of highly conductive micro-springs and their use as sliding-contact interconnects. Micro- and Nanoengineering Conference 2002; 2002 September 16-19; Lugano; Switzerland. (to appear in special issue of Microelectronic Engineering)