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Stressed-metal NiZr probes for atomic force microscopy

  • Microelectronic Engineering
 
 
citation

Hantschel, T. ; Chow, E. M. ; Rudolph, D. ; Shih, C. ; Wong, L. ; Fork, D. K. Stressed-metal NiZr probes for atomic force microscopy. Microelectronic Engineering. 2003; 67-68 (16): 803-809.

PARC authors

Eugene Chow
L. Lai Wong

 

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