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TECHNICAL PUBLICATIONS:
Stressed-metal NiZr probes for atomic force microscopy
- Microelectronic Engineering
citation
Hantschel, T. ; Chow, E. M. ; Rudolph, D. ; Shih, C. ; Wong, L. ; Fork, D. K. Stressed-metal NiZr probes for atomic force microscopy. Microelectronic Engineering. 2003; 67-68 (16): 803-809.
PARC author
publications
Bent metal beams as probes for high-topography substrates in atomic force microscopy (AFM)
Chip on glass bonding using StressedMetal™ Technology
Wafer level packaging using StressedMetal™ technology
Intermittency study of a stressed-metal micro-spring sliding electrical contact
Stressed metal probes for atomic force microscopy
Wafer level packaging with soldered stress engineered micro-springs
Pressure contact micro-springs in small pitch flip-chip packages
Applications of stress-engineered MEMS
Solder-free pressure contact micro-springs in high-density flip-chip packages