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Laser processing of amorphous silicon for large area polysilicon imagers

 
 
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Boyce, J. B. ; Fulks, R. T. ; Ho, J. ; Lau, R.; Lu, J. P. ; Mei, P. ; Street, R. A. ; van Schuylenbergh, K.; Wang, Y. Laser processing of amorphous silicon for large area polysilicon imagers. Third Symposium on Thin Films for Large Area Electronics; 2000 May 30 - June 2; Strasbourg, France. In Thin Solid Films. 2001 February 15; 383 (1-2): 137-142.