Laser processing of amorphous silicon for large area polysilicon imagers

• EMRS Conference

citation

Boyce, J. B. ; Fulks, R. T. ; Ho, J. ; Lau, R.; Lu, J. P. ; Mei, P. ; Street, R. A. ; van Schuylenbergh, K.; Wang, Y. Laser processing of amorphous silicon for large area polysilicon imagers. Third Symposium on Thin Films for Large Area Electronics; 2000 May 30 - June 2; Strasbourg, France. In Thin Solid Films. 2001 February 15; 383 (1-2): 137-142.