Electrostrictive elastomer based diffractive modulator for use as a variable optical attenuator

• 2003 IEEE/LEOS International Conference on Optical MEMS and Their Applications

Device structure and measurements on an elastomer based MEMS modulator is reported. The configurable reflective phase grating responds to voltage and the surface corrugates to a sinusoidal pattern enabling analog control of the diffracted intensity.

citation

Uma, S. ; Matusiak, R. ; Hecht, D. L. ; Shrader, E. Electrostrictive elastomer based diffractive modulator for use as a variable optical attenuator. IEEE/LEOS International Conference on Optical MEMS and Their Applications; 2003 August 18-21; Waikoloa; HI; USA. Piscataway, NJ; IEEE; 2003; 85-86.