Electrostrictive elastomer based diffractive modulator for use as a variable optical attenuator
Device structure and measurements on an elastomer based MEMS modulator is reported. The configurable reflective phase grating responds to voltage and the surface corrugates to a sinusoidal pattern enabling analog control of the diffracted intensity.
Uma, S. ; Matusiak, R. ; Hecht, D. L. ; Shrader, E. Electrostrictive elastomer based diffractive modulator for use as a variable optical attenuator. IEEE/LEOS International Conference on Optical MEMS and Their Applications; 2003 August 18-21; Waikoloa; HI; USA. Piscataway, NJ; IEEE; 2003; 85-86.