Fabrication of arrays of organic polymeric thin-film transistors using self-aligned microfluidic channels
Arrays of coplanar thin-film transistors (TFTs) were fabricated using microfluidic channels to deposit a solution-processible polymeric semiconductor. The microfluidic channels were self-aligned to the addressing electrodes of the array by UV exposure of a photosensistive polymer, SU-8, through the backside of the transparent substrate that supported the opaque data lines and source, drain, and gate electrodes. The exposed SU-8 formed microfluidic channels over the active regions of the individual TFTs. A solution containing a polymeric semiconductor was allowed to flow into the channels leaving the active semiconducting layer after drying. The method produces TFTs with effective mobilities of 0.05 cm2V-1s-1 and on-to-off current ratios of 108 using a regioregular poly(thiophene).
Chabinyc, M. ; Wong, W. S. ; Paul, K. ; Street, R. A. Fabrication of arrays of organic polymeric thin-film transistors using self-aligned microfluidic channels. Advanced Materials. 2003 November; 15 (22): 1903-1907.