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Laser processing of amorphous silicon for polysilicon devices, circuits and flat-panel imagers

 
 
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Boyce, J. B. ; Fulks, R. T. ; Ho, J. H. ; Lau, R. K. ; Lu, J. P. ; Mei, P. ; Street, R. A. ; Van Schuylenbergh, K. ; Wang, Y. Laser processing of amorphous silicon for polysilicon devices, circuits and flat-panel imagers. Amorphous and Heterogeneous Silicon Thin Films - 2000; Materials Research Society Symposium Proceedings; 2000 April 24-28; San Francisco, CA. Warrendale, PA: MRS; 2001; 609: A31.4.1-12.