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TECHNICAL PUBLICATIONS:
Laser processing for amorphous Si air-gap TFTs
- Thin Film Transistor Technologies V, ECS 198th Meeting Proceedings
citation
Mei, P. ; Ho, J. ; Wang, Y. ; Lau, R.; Street, R .; Boyce, J. B. ; Lu, J. P. Laser processing for amorphous Si air-gap TFTs. Thin Film Transistor Technologies V, Electrochemical Society 198th Meeting Proceedings; 2000 October 22-27; Phoenix, AZ.
PARC authors
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