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Laser processing for amorphous Si air-gap TFTs

 
 
citation

Mei, P. ; Ho, J. ; Wang, Y. ; Lau, R.; Street, R .; Boyce, J. B. ; Lu, J. P. Laser processing for amorphous Si air-gap TFTs. Thin Film Transistor Technologies V, Electrochemical Society 198th Meeting Proceedings; 2000 October 22-27; Phoenix, AZ.