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Hydrogenated amorphous silicon thin-film transistor arrays fabricated by digital lithography

 

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citation

Wong, W. S. ; Ready, S. E. ; Lu, J. P. ; Street, R. A. Hydrogenated amorphous silicon thin-film transistor arrays fabricated by digital lithography. IEEE Electron Device Letters. 2003 September 9; 24 (9): 577-579.

copyright

Copyright © 2003 Controlled Release Society. Reproduced from the 40th CRS Annual Meeting Abstracts Online, 2013, Controlled Release Society, St. Paul, MN, USA.