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Hydrogenated amorphous silicon thin-film transistor arrays fabricated by digital lithography
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citation
Wong, W. S. ; Ready, S. E. ; Lu, J. P. ; Street, R. A. Hydrogenated amorphous silicon thin-film transistor arrays fabricated by digital lithography. IEEE Electron Device Letters. 2003 September 9; 24 (9): 577-579.
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Copyright © 2003 Palo Alto Research Center, Incorporated. All rights reserved.
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