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High-Q RF coils on silicon integrated circuits

 
 
citation

Chua, C. L. ; Fork, D. K. ; Van Schuylenbergh, K. ; Lu, J. P. High-Q RF coils on silicon integrated circuits. MEMS Components and Applications for Industry, Automobiles, Aerospace and Communication II; 2003 January 28-29; San Jose, CA. Bellingham, WA: SPIE; 2003; 4981: 150-155.