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Thin-film transistor fabrication by digital lithography

 

Review of digital lithographic processing for large-area electronics. Book chapter will review processing of a-Si:H-based TFTs and how jet printed etch masks can be used to process TFTs

 
citation

Wong, W. S. ; Daniel, J. H. ; Chabinyc, M. ; Ready, S. E. ; Lujan, R. A. Thin-film transistor fabrication by digital lithography. In Organic electronics: materials, manufacturing and applications, edited by H. Klauk. Wiley VCH; 2006.