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Applications of stress-engineered MEMS


Curved cantilever metal beams have been demonstrated to be valuable for a variety of applications, including IC packaging/testing, RF coils, afm tips, and actuators.


Chow, E. M. ; Fork, D. K. ; Chua, C. L. ; Hantschel, T. ; Van Schuylenbergh, K. ; De Bruyker, D. ; Rosa, M. A. ; Peeters, E. Applications of stress-engineered MEMS. Stanford ME342 MEMS Seminar; 2005 July 13; Stanford; CA; USA.