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Excimer laser processing for a-Si thin film transistors for imager applications
- 46th National Symposium of the American Vacuum Society
citation
Lu, J. P. ; Mei, P. ; Fulks, R. T. ; Rahn, J. T. ; Ho, J. H. ; Wang, J. ; Boyce, J. B. ; Street, R. A. Excimer laser processing for a-Si thin film transistors for imager applications. 46th National Symposium of the American Vacuum Society; 1999 October 25-30. In Journal of the American Vacuum Society A. 2000 July-August; 18 (4): 1823-1829.
PARC authors
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