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Pulsed laser crystallization and doping for thin film transistors
- 18th International Conference on Amorphous and Microcrystalline Semiconductors
citation
Mei, P. ; Boyce, J. B. ; Lu, J. P. ; Ho, J. ; Fulks, R. T. Pulsed laser crystallization and doping for thin film transistors. Papers from the 18th International Conference on Amorphous and Microcrystalline Semiconductors - Science and Technology (ICAMS-18); 1999 August 23-27; Snowbird, Utah. In Journal of Non-Crystalline Solids; 2000 May; 266-269: 1252-1259.
PARC author
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