Indium tin oxide transparent electrodes for vertical cavity surface emitting lasers fabricated using a single lithography step
Indium tin oxide (ITO) films have gained widespread use in many optoelectronic devices because of their unique ability to simultaneously provide high electrical conductivity and high optical transparency. Under appropriate thermal treatment, IT0 can also be made to form good ohmic contacts with GaAs while retaining its high conductivity and transparency. This latter property has only recently been exploited for use in vertical-cavity semiconductor lasers (VCSELs). In this presentation, we examine the use of IT0 for greatly simplifymg VCSEL fabrication.
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Chua, C. L.; Thornton, R. L.; Treat, D. W.; Yang, V. K.; Dunnrowicz, C. C. Indium Tin Oxide transparent electrodes for vertical cavity surface emitting laser fabricated using a single lithography step. Summaries of Papers PResented at the Conference on Lasers and Electro-Optics (CLEOS); 1997 May 18-23; Baltimore, MD. Piscataway NJ: IEEE; 1997; 196-197.
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