Characteristics of lead zirconate titanate ferroelectric thick films from a screen printing laser transfer method
Microstructures and electrical properties of lead zirconate titanate thick films made from a screen printing laser transfer method were studied. The PZT thick film elements were first screen printed on a sapphire substrate and sintered at 1150 to 1250 °C. Then they were bonded to the target substrate such as silicon and released from the sapphire through an excimer laser exposure from the backside of the sapphire substrate. This approach makes it possible to obtain very dense films as there is less limitation on sintering conditions when sintered on sapphire, and allows integrating patterned PZT thick films onto many kinds of substrates. The thick films have dielectric constants of 1397 to 1675, remnant polarization of 32 to 35 µC/cm2, and piezoelectric constant d31 of about -124pm/V.
Xu, B.; White, D.; Zesch, J.; Rodkin, A.; Buhler, S.; Fitch, J.; Littau, K. Characteristics of lead zirconate titanate ferroelectric thick films from a screen printing laser transfer method. Applied Physics Letters. 2005 November 7; 87 (19): 192902.