High resolution x-ray imaging using amorphous silicon flat panel arrays
Two dimensional amorphous silicon arrays are the emerging technology for digital medical x-ray imaging. This paper demonstrates an improved pixel design compared with the current generation of imagers. The geometry of the pixel sensor has been extended from a mesa isolated structure into a continuous layer above the readout structures of the array. This approach improves sensitivity to visible light, and to xray illumination when coupled with a conversion phosphor. Furthermore, this 3-dimensional geometry allows for the fabrication of the finest pitch amorphous silicon array yet manufactured, with a pixel size of 64 pm square. A test array (512x640 pixels) has been fabricated and tested which demonstrates the success of this approach.
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Rahn, J.; Lemmi, F.; Lu, J. P.; Mei, P.; Apte, R. B.; Street, R. A.; Lujan, R.; Weisfield, R. L.; Heanue, J. A. High resolution x-ray imaging using amorphous silicon flat panel arrays. IEEE Transactions on Nuclear Science. 1999 June; 46 (3, part 2): 457-461.
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