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Effect of Si doping on the strain and defect structure of GaN thin films

 
 
citation

Romano, L. T. ; Van de Walle, C. G. ; Krusor, B. S. ; Lau, R. K. ; Ho, J. H. ; Schmidt, T. J. ; Ager III, J. W. ; Goetz, W. K. ; Kern, R. S Effect of Si doping on the strain and defect structure of GaN thin films. 20th International Conference on Defects in Semiconductors; 1999 July 26-30; Berkeley, CA. In Physica B. 1999 December; 274: 50-53.