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Self-limiting oxidation for fabricating sub-5 nm silicon nanowires

 
 
citation

Liu, H. I.; Biegelsen, D. K.; Ponce, F. A.; Johnson, N. M.; Pease, R. F. W. Self-limiting oxidation for fabricating sub-5 nm silicon nanowires. Applied Physics Letters. 1994 March 14; 64 (11): 1383-1385.