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Self-limiting oxidation of Si nano-wires

 
 
citation

Liu, H. I.; Biegelsen, D. K.; Johnson, N. M.; Ponce, F. A.; Pease, R. F. W. Self-limiting oxidation of Si nano-wires. Journal of Vacuum Science and Technology B. 1993 November/December; 11 (6): 2532-2537.