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Thermodynamic equilibration kinetics of phosphorus and boron doped a-Si:H

  • Journal of Non-Crystalline Solids
 
 
citation

Nebel, C. E.; Street, R. A.; Jackson, W. B.; Johnson, N. M. Thermodynamic equilibration kinetics of phosphorus and boron doped a-Si:H. Journal of Non-Crystalline Solids. 1993; 164-166: 203-206.

PARC authors

Bob Street
Noble Johnson

 

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