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Fabrication of Si nanostructures for light emission study

 
 
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Liu, H. I.; Maluf, N. I.; Pease, R. F. W.; Biegelsen, D. K.; Johnson, N. M.; Ponce, F. A. Fabrication of Si nanostructures for light emission study. Journal of Vacuum Science and Technology B. 1992 November/December; 10 (6): 2846-2850.