Fabrication of Si nanostructures for light emission study

• Journal of Vacuum Science and Technology B

citation

Liu, H. I.; Maluf, N. I.; Pease, R. F. W.; Biegelsen, D. K.; Johnson, N. M.; Ponce, F. A. Fabrication of Si nanostructures for light emission study. Journal of Vacuum Science and Technology B. 1992 November/December; 10 (6): 2846-2850.