Spatial profiling of electron traps in silicon nitride thin films

• Journal of Applied Physics

citation

Y. C. Park, W. B. Jackson, N. M. Johnson, and S. B. Hagstrom, "Spatial profiling of electron traps in silicon nitride thin films," Journal of Applied Physics, Vol. 68, No. 10, pp. 5212-5221 (15 November 1990)