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Impurity incorporation and doping efficiency in a-Si:H

  • Physical Review B
 
 
citation

K. Winer, R. A. Street, N. M. Johnson, and J. Walker, "Impurity incorporation and doping efficiency in a-Si:H," Physical Review B, Vol. 42, No. 5, pp. 3120-3128 (15 August 1990).

PARC authors

Bob Street
Noble Johnson

 

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