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Deposition of a-Si:H thin films with a remote hydrogen plasma

 
 
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N. M. Johnson, J. Walker, C. M. Doland, K. Winer, and R. A. Street, "Deposition of a-Si:H thin films with a remote hydrogen plasma,” Amorphous Silicon Technology--1989 (Materials Research Society, Pittsburgh, PA, 1989), eds. A. Madan, M. J. Thompson, P. C. Taylor, Y. Hamakawa, and P. G. LeComber, Materials Research Society Symposium Proceedings, Vol. 149, pp. 39-43.