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Solid-source doping of a-Si:H thin films deposited with a remote hydrogen plasma

 
 
citation

N. M. Johnson, R. A. Street, J. Walker, and K. Winer, "Solid-source doping of a-Si:H thin films deposited with a remote hydrogen plasma," Journal of Non-Crystalline Solids, Vol. 114, pp. 169-171 (1989).