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Dependence of hydrogen incorporation in undoped a-Si:H and c-Si:H on hHydrogen dilution during PECVD

 
 
citation

N. M. Johnson, S. H. Wolff, C. D. Doland, and J. Walker, "Dependence of hydrogen incorporation in undoped a-Si:H and c-Si:H on hHydrogen dilution during PECVD,” Amorphous Silicon Technology (Materials Research Society, Pittsburgh, PA, 1988), eds. Y. Hamakawa, P. C. Taylor, P. G. LeComber, M. J. Thompson, and A. Madan, Materials Research Society Proceedings Series, Vol. 118, pp. 85-90.