The localization and crystallographic dependence of Si suboxide species at the SiO2/Si interface

• Journal of Applied Physics

citation

P. J. Grunthaner, M. H. Hecht, F. J. Grunthaner, and N. M. Johnson, "The localization and crystallographic dependence of Si suboxide species at the SiO2/Si interface," Journal of Applied Physics, Vol. 61, pp. 629-638 (1987).