Deep level transient spectroscopy: defect characterization in semiconductor devices

• Materials Characterization, MRS Proceedings Vol. 69

citation

N. M. Johnson, "Deep level transient spectroscopy: defect characterization in semiconductor devices," Materials Characterization (Materials Research Society, Pittsburgh, PA, 1987), eds. N. W. Cheung and M.-A. Nicolet, MRS Proceedings Vol. 69, pp. 75-94.