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Electrical characterization of crystallized silicon thin films

 
 
citation

N. M. Johnson, "Electrical characterization of crystallized silicon thin films," Semiconductor-on-Insulator and Thin-film Transistor Technology (Materials Research Society, Pittsburgh, PA, 1986), eds. A. Chiang, M. W. Geis, and L. Pfeiffer, MRS Proceedings Vol. 53, pp. 337-347.