Selective hydrogen passivation of oxygen-related thermal-donor clusters in silicon

• Materials Science Forum

citation

N. M. Johnson, S. K. Hahn, and H. J. Stein, "Selective hydrogen passivation of oxygen-related thermal-donor clusters in silicon," Defects in Semiconductors (Trans Tech Publ. Ltd., Switzerland, 1986), ed. H. J. von Bardeleben, Materials Science Forum Vols. 10-12 (1986), pp. 585-590.