Native defects at the Si/SiO2 interface-amorphous silicon revisited

• Applications of Surface Science

citation

D. K. Biegelsen, N. M. Johnson, M. Stutzmann, E. H. Poindexter, and P. J. Caplan, "Native defects at the Si/SiO2 interface-amorphous silicon revisited," Applications of Surface Science, Vol. 22/23, pp. 879-890 (1985).