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Microwave plasma oxidation of silicon

 
 
citation

C. Y. Fu, J. C. Mikkelsen, Jr., J. Schmitt, J. Abelson, J. C. Knights, N. M. Johnson, A. Barker, and M. J. Thompson, "Microwave plasma oxidation of silicon," Journal of Electronic Materials, Vol. 14, pp. 685-706 (1985).