Defect reduction by tilted zone crystallization of patterned silicon films on fused silica

• Energy Beam-Solid Interactions and Transient Thermal Processing, Materials Research Society Symposium Proceedings, vol. 23

citation

L. E. Fennell, M. D. Moyer, D. K. Biegelsen, A. Chiang, and N. M. Johnson, "Defect reduction by tilted zone crystallization of patterned silicon films on fused silica," eds. J. C. C. Fan and N. M. Johnson, Proceedings of Materials Research Society Symposium on Energy Beam-Solid Interactions and Transient Thermal Processing; 1983 November 14-17; Boston. New York: Elsevier Science Publishing Co., Inc; 1984; Vol. 23: pp. 403-408.