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Electronic deep levels in laser-crystallized silicon thin-film MOS capacitors on fused silica

  • Materials Research Society Symposia Proceedings vol. 33
 
 
citation

Johnson, N.M.; Moyer, M.D. Electronic deep levels in laser-crystallized silicon thin-film MOS capacitors on fused silica. Materials Research Society Symposia Proceedings. 1984; 33: 101-108.

PARC author

Noble Johnson

 

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