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Measurement of semiconductor-insulator interface states by constant-capacitance, deep-level transient spectroscopy

  • Journal of Vacuum Science and Technology
 
 
citation

N. M. Johnson, "Measurement of semiconductor-insulator interface states by constant-capacitance, deep-level transient spectroscopy," Journal of Vacuum Science and Technology, Vol. 21 (No. 2), pp. 303-314 (1982).

PARC author

Noble Johnson

 

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