Deuterium at the Si-SiO2 interface detected by secondary ion mass spectrometry

• Applied Physics Letters

citation

N. M. Johnson, D. K. Biegelsen, M. D. Moyer, V. R. Deline, and C. A. Evans, Jr., "Deuterium at the Si-SiO2 interface detected by secondary ion mass spectrometry," Applied Physics Letters, Vol. 38, 995 (1981).