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Deuterium at the Si-SiO2 interface detected by secondary ion mass spectrometry

 
 
citation

N. M. Johnson, D. K. Biegelsen, M. D. Moyer, V. R. Deline, and C. A. Evans, Jr., "Deuterium at the Si-SiO2 interface detected by secondary ion mass spectrometry," Applied Physics Letters, Vol. 38, 995 (1981).