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Raman spectroscopic evaluation of silicides formed with a scanned electron beam

 
 
citation

R. J. Nemanich, T. W. Sigmon, N. M. Johnson, M. D. Moyer, and S. S. Lau, "Raman spectroscopic evaluation of silicides formed with a scanned electron beam," Laser and Electron-Beam Solid Interactions and Materials Processing (Elsevier, New York, 1981), eds. J. F. Gibbons, L. D. Hess, and T. W. Sigmon, pp. 541-546.