MEMS fabrication technology applied to large area x-ray image sensor arrays

• Journal of Vacuum Science and Technology

citation

Daniel, J. H. ; Krusor, B. S. ; Apte, R. B. ; Mulato, M. ; Van Schuylenbergh, K. ; Lau, R. K. ; Do, T. ; Street, R. A. ; Goredema, A.; Boils-Boissier, D. C.; Kazmaier, P. M. MEMS fabrication technology applied to large area x-ray image sensor arrays. Journal of Vacuum Science and Technology A. 2001 Jul/Aug; A19 (4): 1219-1223.