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Deep levels in scanned electron-beam annealed silicon

 
 
citation

N. M. Johnson, J. L. Regolini, D. J. Bartelink, J. F. Gibbons, and K. N. Ratnakumar, "Deep levels in scanned electron-beam annealed silicon," Applied Physics Letters, Vol. 36, pp. 425-428 (1980).