Deep levels in scanned electron-beam annealed silicon

• Applied Physics Letters

citation

N. M. Johnson, J. L. Regolini, D. J. Bartelink, J. F. Gibbons, and K. N. Ratnakumar, "Deep levels in scanned electron-beam annealed silicon," Applied Physics Letters, Vol. 36, pp. 425-428 (1980).