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Deep levels in ion-implanted, CW laser-annealed silicon

 
 
citation

N. M. Johnson, R. B. Gold, A. Lietoila, and J. F. Gibbons, "Deep levels in ion-implanted, CW laser-annealed silicon," Laser-Solid Interactions and Laser Processing-1978, AIP Conf. Proc. 50 (Amer. Inst. Phys., New York, 1979), eds. S. D. Ferris, H. J. Leamy, and J. M. Poate, pp. 550-555.