Scanning electron beam annealing with a modified SEM

• Journal of Vacuum Science and Technology

citation

K. N. Ratnakumar, R. F. W. Pease, D. J. Bartelink, and N. M. Johnson, "Scanning electron beam annealing with a modified SEM," Journal of Vacuum Science and Technology, Vol. 16, pp. 1843-1846 (1979).