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TECHNICAL PUBLICATIONS:
Scanning electron beam annealing with a modified SEM
- Journal of Vacuum Science and Technology
citation
K. N. Ratnakumar, R. F. W. Pease, D. J. Bartelink, and N. M. Johnson, "Scanning electron beam annealing with a modified SEM," Journal of Vacuum Science and Technology, Vol. 16, pp. 1843-1846 (1979).