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Auger sputter profiling studies of the Si-SiO2 interface

 
 
citation

C. R. Helms, N. M. Johnson, S. A. Schwarz, and W. E. Spicer, "Auger sputter profiling studies of the Si-SiO2 interface," Semiconductor Characterization Techniques (Electrochemical Society Inc., New Jersey, 1978), eds. P. A. Barnes and G. A. Rozgonyi, pp. 136-138.